| 摘要 |
It is an object of the invention to provide an MEMS microphone having a directionality. A card type MEMS microphone according to the invention comprises a substrate having a first through hole and a second through hole, an MEMS chip in which a space formed by a diaphragm electrode and a silicon substrate is mounted in a position to surround an outlet of the first through hole and which serves to convert a sound signal propagated to the diaphragm electrode into an electric signal, and an acoustic resisting member mounted in a position covering the first through hole at a substrate surface on an opposite side to a side on which the MEMS chip is mounted, and the substrate has a terminal for transmitting an electric signal output from the MEMS chip to an electronic apparatus and takes a shape of a card which can be attached to and removed from the electronic apparatus, and the second through hole is a hole which a sound signal passes to be propagated to the diaphragm electrode around the substrate.
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