| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tantalum carbide sintered compact having high purity, high density and high mechanical strength and suitably used as a heat resistant material forming a molding die molding glass, resin, ceramics or the like or a target material for tantalum carbide film deposition, to provide a method for producing the same, further to provide a molding die and a target material formed by the tantalum carbide sintered compact. <P>SOLUTION: The tantalum carbide sintered compact has a purity of ≥98.5 mass%, and whose relative density as a ratio of bulk density to true density is ≥96.5%. The tantalum carbide sintered compact is obtained by sintering tantalum carbide powder having a purity of ≥99 mass% and a mean grain size of ≤3 μm under the conditions where sintering pressure is ≥20 MPa, sintering temperature is 1,600 to 2,300°C, and sintering time is ≥30 min in an inert gas atmosphere or in a vacuum atmosphere of ≤30 Pa. <P>COPYRIGHT: (C)2009,JPO&INPIT |
