| 摘要 |
PROBLEM TO BE SOLVED: To provide a block valve for vessel, the valve which supplies and controls gasification material such as medical fluid by vaporization or sublimation when it is arranged in a channel of semiconductor manufacturing apparatus, replaces only a joint part without replacing whole or the other part, contributes to cost reduction, exhibits compactness, prevents gas from leaking exactly, suppresses a reduction of channel rinsing degree, and supplies the gas by heating the whole uniformly. SOLUTION: The block valve for vessel is provided with: a channel block 20 for accumulation valve in an inlet side and outlet side ports 13, 14 arranged in a vessel body 12, on the vessel body 12 in such a state of communication; and a block member 40 for a joint removably in an inlet port and outlet port of this channel block 20. COPYRIGHT: (C)2009,JPO&INPIT
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