Organic Electroluminescence Element Defect Inspection Apparatus, Organic Electroluminescence Element And Organic Electroluminescence Element Defect Inspection Method

摘要

One embodiment of the present invention is an organic electroluminescence element defect inspection apparatus wherein the apparatus brings in an optical image of a substrate to be inspected and detects a pattern defect of an organic luminescent layer on the substrate to be inspected. The above is performed after an organic luminescent layer is formed on a substrate in a method of manufacturing an organic electroluminescence element. The organic electroluminescence element includes at least one or more organic luminescent layers having a luminescence area, an anode which injects a hole into the organic luminescent layer and a cathode which injects an electrode into the organic luminescent layer on a substrate. And an optical source for obtaining an optical image from a substrate to be inspected is infra-red radiation.