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发明名称
摘要
申请公布号	JP2009523915(A)	申请公布日期	2009.06.25
申请号	JP20080551285	申请日期	2007.01.05
申请人		发明人
分类号	C23C14/24;H01L21/365;H01L51/50;H05B33/10	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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