| 摘要 |
PROBLEM TO BE SOLVED: To observe a material three-dimensionally which is constituted of light elements, such as, organic materials in a level of nano unit. SOLUTION: The three-dimensional X-ray CT apparatus constituted of a vacuum chamber 3 which is evacuated by a vacuum pump 13 and where at least an X-ray irradiating part 23 faces therein; an X-ray irradiating device 5 for irradiating X-rays of 1 to 10keV low energy X-rays in a cone shape; a rotatable sample station 7, having a sample-setting base 35 capable of setting the sample on the same at the proper position of the center line C-1 of the X-rays irradiated by the X-ray irradiating device 5; and a two-dimensional X-ray detector 9 with a detection surface 9a, cooled by a cooling means for mutually facing of the X-ray irradiating device 5, while the sample 15 set on the sample setting base 35 of the sample station 7 is held inbetween, and the sample 15 is projected divergently on the detection surface 9a by the conical X-rays which are irradiated into the vacuum chamber 3. COPYRIGHT: (C)2009,JPO&INPIT
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