| 摘要 |
PROBLEM TO BE SOLVED: To reduce the nonuniformity of a sensor due to displacement between a diaphragm and a resistance formed on the diaphragm. SOLUTION: A part thicker than the outer periphery of the diaphragm is provided inside the diaphragm formed on a semiconductor substrate, and a pair of resistances forming a bridge is disposed at positions located in the outer peripheral part of the diaphragm and adjoining the inside of the diaphragm, while the other pair of the resistances is disposed outside the diaphragm. As the result, the nonuniformity due to the positional discrepancy between the diaphragm and piezo resistances which is caused by that a uniform stress area is brought about in the outer periphery inside the diaphragm, is eliminated. COPYRIGHT: (C)2009,JPO&INPIT
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