发明名称 PICK AND PLACE SYSTEM FOR A SEMICONDUCTOR ASSEMBLY DEVICE
摘要 The invention relates to a semiconductor assembly device comprising a pick and place system (7) with a bond head (8), provided with a first drive system (13) and a second drive system (14) for displacing the bond head (8) in a predetermined direction. The first drive system (13) comprises a first pivoting arm (16) and a first stationary drive (19) which serves to pivot back and forth the pivoting arm (16) within a predefined pivoting range. The second drive system (14) is mounted on the pivoting arm (16) and comprises a first pivoting lever (24), a second pivoting lever (26) and a second stationary drive (25) provided with a stationary electric motor (44) which serves to displace the two pivoting levers (24, 26) relative to one another between two stretched end positions (A, B). The end positions (A, B) vary along the predetermined direction in accordance with the stroke of the first drive system (13).
申请公布号 WO2009037108(A3) 申请公布日期 2009.06.25
申请号 WO2008EP61589 申请日期 2008.09.03
申请人 OERLIKON ASSEMBLY EQUIPMENT AG, STEINHAUSEN;ETTER, FLORENTIN 发明人 ETTER, FLORENTIN
分类号 B25J9/06;B25J9/10;H01L21/00;H01L21/58;H05K13/04 主分类号 B25J9/06
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