X-RAY EXAMINING APPARATUS AND METHOD

摘要

An X-ray examining apparatus enabling quick and simple examination and moreover instantaneous close examination if necessary. The X-ray examining apparatus comprises an X-ray source having a cone-shaped irradiation region, a holding mechanism for holding a work to be examined and an X-ray camera having a flat imaging surface. The X-ray examining apparatus further comprises a mechanism in which the reference surface of the work and the imaging surface arranged parallel to each other, the optical axis of the X-rays radiated from the X-ray source is tilted with respect to the reference surface of the work, the x-rays obliquely fall on the imaging surface, either the work or the X-ray source and the X-ray camera are rotated around the center axis of the apparatus on a circle while the arrangement relation among the X-ray source, the holding mechanism, and the X-ray camera is kept. The X-ray examining apparatus still further comprises an imaging surface rotating mechanism for rotating the imaging surface around the center normal (the center axis of the imaging surface) or freely setting the imaging surface according to a desired capturing angle at which the projection data is acquired. The imaging surface rotating mechanism is operable while constantly keeping the imaging surfacein a predetermined orientation with respect to the center axis.