| 摘要 |
<p>The substrate holder for gas diffusion furnaces, comprises guiding devices such as cross beams for the positioning and guidance of the holder in the interior of the gas diffusion furnace, and substrate recesses. Two lower support bars, on which the substrates mount, are outwardly arranged with respect to geometrical substrate expansion and are sufficiently long so that the substrates does not slid downwards from the lower bars during heating or cooling. The lower support bars are arranged in an axially symmetric manner and optionally rollable on the lower longitudinal beams of the boat. The substrate holder for gas diffusion furnaces, comprises guiding devices such as cross beams for the positioning and guidance of the substrate holder in the interior of the gas diffusion furnace, and substrate recesses. Two lower support bars, on which the substrates mount, are outwardly arranged with respect to geometrical substrate expansion and are sufficiently long so that the substrates does not slid downwards from the lower bars during heating or cooling. The lower support bars are arranged in an axially symmetric manner and optionally rollable on the lower longitudinal beams of the boat, and comprise guiding slots and/or guidance recesses or -grooves. The substrates are guided at the front side in the guiding slots and/or guidance recesses of the boat. The guiding slots and/or guidance recesses of the boat and the lower support bars are not equidistant. The two outer guiding slots and/or guidance recesses and the lower support bars have a distance to the inner guiding slots and/or guidance recesses and the lower support bars in inward direction larger than all further inner guiding slots and/or guidance recesses, where the distances are continuously increased outwardly from the center.</p> |
