发明名称 COATING APPARATUS
摘要 <p>A coating apparatus is provided to improve accuracy of a thickness of a coated layer by adjusting properly the transferring amount of paints. A coating apparatus includes a tube(2), a housing, a paint injection unit, a paint discharge unit, and a pump(7). A fluid is supplied to the tube. The tube is expanded or contracted by the fluid. A manifold(3) for receiving the tube is formed in the housing. The paint injection unit is formed by connecting the manifold with the housing. The paint discharge unit is formed by connecting the manifold with the housing. The pump is connected to the tube. The pump is used for contracting the tube in order to fill the manifold with the paints or for expanding the tube in order to discharge the paints from the manifold.</p>
申请公布号 KR20090068123(A) 申请公布日期 2009.06.25
申请号 KR20080125501 申请日期 2008.12.10
申请人 CHUGAI RO CO., LTD. 发明人 NISHIO TSUTOMU;WEI ZHIDAN;KUROKI TAKASHI
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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