| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a carbon fiber device capable of forming a metal catalyst layer in nearly the whole region of the bottom face of a hole of a hole forming layer, and to provide a manufacturing method of the carbon fiber device. <P>SOLUTION: The FED (carbon fiber device) 1 is equipped with a cathode substrate 2, a cathode electrode 3 formed on the cathode substrate 2, the metal catalyst layer 4 formed on the cathode electrode 3, a hole forming layer 6 which covers one part of the metal catalyst layer 4, in which the hole 17 to expose the metal catalyst layer 4 is formed, and which includes an insulating layer 16, and a carbon fiber 5 extending from the metal catalyst layer 4 exposed from the hole forming layer 6. In the manufacturing method of the FED 1, after forming the metal catalyst layer 4, the hole forming layer 6 is formed. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
