METHOD FOR PRODUCING STRUCTURE HAVING PERFORATED SEALING STRIP AND STRUCTURE OBTAINED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a sealing method capable of controlling the height of a cavity delineated by a seal in sealing a microsystem without overflowing onto a device region by deformation in sealing.

SOLUTION: The structure comprises a first substrate 1, a microsystem 2 such as a Micro-Electro-Mechanical System (MEMS) or Micro-Opto-Electro-Mechanical System (MOEMS), a sealing strip 3, and a second substrate 4, wherein the first substrate 1 and the second substrate 4 are bonded to each other by crushing the sealing strip 3 and a closed cavity is delineated. The sealing strip 3 before crushing has a plurality of voids comprising circular cylindrical holes parallel to the substrates or circular cylindrical holes perpendicular to the substrates.

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