| 摘要 |
PROBLEM TO BE SOLVED: To improve heat treatment efficiency by simplifying constitution and to perform high-precision thermal control over a number of heating elements. SOLUTION: An introducing-side connection connector 11 and a discharging-side connection connector 12 are disposed side by side in a plate body 10, a conduit 13 with a return-side flow passage 132 linked to the discharging-side connection connector 12 by returning an introducing-side flow passage 131 linked to the introducing-side connection connector 11 is buried in the plate body 10, and the heating elements 14 are disposed in an area between the introducing-side flow passage 131 and return-side flow passage 132 on the plate body 10. COPYRIGHT: (C)2009,JPO&INPIT
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