| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator that ensures the design flexibility in designing a base and an opposite substrate and having bonding strength and dimension accuracy when the base is bonded to the opposite substrate, and to provide an image forming apparatus. SOLUTION: The actuator 1 includes a base 2 with a vibrating portion 20 having a movable plate 23 and a pair of coupling portions 250, 250 for movably supporting the movable plate 23; an opposite substrate 3 bonded to the base 2 via a bonding film 4; and a drive means for movably driving the movable plate 23 by electrostatic force. The bonding film 4 includes an Si skeleton containing siloxane (Si-O) bonding and having a random atom structure, and a leaving group coupling to the Si skeleton. By giving energy to at least part of the bonding film 4, the leaving group present in the vicinity of the surface of the bonding film 4 leaves from the Si skeleton, and the adhesiveness exhibited in the region on the surface of the bonding film 4 bonds the base 2 to the opposite substrate 3. COPYRIGHT: (C)2009,JPO&INPIT
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