| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure impedance of a circuit to be measured. SOLUTION: This impedance measuring apparatus comprises a voltage generating section 51 for generating an alternating current signal S1 for applying voltage Vx for inspection to wiring clamped by an applying clamp section 11, a current measuring section 52 for measuring detection current Id flowing to winding 23 of a detection clamp section 21, and a processing section 54 that calculates the product value of resistance R1 and a first current value Id1 of detection current Id measured by the current measuring section 52 and stores it as a base value Db in a state where the wiring 42 of a calibration circuit 41 whose resistance R1 is known is clamped by both clamp sections 11 and 21 and the voltage Vx for inspection is applied, and calculates the resistance Rx of a circuit 5 to be measured by dividing the base value Db by a second current value Id2 of detection current Id measured by the current measuring section 52 in a state where the wiring 5a of the circuit 5 to be measured is clamped by both clamp sections 11 and 21 and the voltage Vx for inspection is applied. COPYRIGHT: (C)2009,JPO&INPIT
|
