| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature heightening/lowering unit and a temperature heightening/lowering test handler, that increase or decrease temperatures of a large amount of semiconductor devices at a time, and achieve a high-speed processing as the whole system. SOLUTION: In the handler for carrying out a high-temperature test and a low-temperature test, the temperature heightening/lowering unit 1 is composed of a temperature increasing unit 11 and a temperature decreasing unit 12 each being a portion of a process performing apparatus arranged on a circumferentially equally disposed position of the test handler H which applies various treatment processes on devices such as an electronic component, a semiconductor device and the like. The temperature increasing/decreasing unit 1 includes: a drum 2 which is applied with a rotational force by a motor M1 through a belt and rotates around a rotation axis O; and a separation table 3. The drum 2 is made up by arranging cylindrical container rails 21 annularly each comprising a carrying path for the devices therein and an opening in the outer circumferential direction of the drum 2. The separation table 3 is disposed in a chamber shared by the drum 2 and configured to rotate a device discharged from the drum 2, through 90°. COPYRIGHT: (C)2009,JPO&INPIT
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