发明名称 CMOS IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME
摘要 A complementary metal oxide silicon (CMOS) image sensor and a method for fabricating the same. In one example embodiment, a CMOS image sensor includes a substrate, a first dielectric film, a plurality of metal patterns, a second dielectric film, a plurality of via holes, a plurality of metal wires, a plurality of silicon oxide films, a plurality of trenches, and a plurality of photo diodes. The first dielectric film is formed on the substrate. The metal patterns are formed on the first dielectric film. The second dielectric film is formed on the first dielectric film and on the metal patterns. The via holes are formed through the second dielectric film. The metal wires are each formed in one of the via holes. The silicon oxide films are formed on the second dielectric film. The trenches are formed between the silicon oxide films. The photo diodes are formed in the trenches.
申请公布号 US2009159941(A1) 申请公布日期 2009.06.25
申请号 US20080254321 申请日期 2008.10.20
申请人 DONGBU HITEK CO., LTD. 发明人 MOON SANG TAE
分类号 H01L27/146;H01L31/18 主分类号 H01L27/146
代理机构 代理人
主权项
地址