DEVICE FOR ILLUMINATING A FACE AND DEVICE FOR IMPINGING A LIGHT ON A WORKING AREA

摘要

A surface lighting device and a device for providing the light to a process area are provided to reduce the intensity of an optical source without cooling a mask by absorbing little light by the mask. One or more optical sources(1) generate light(3) used for illumination. An optical unit(2) shapes the light generated by one or more optical sources. A surface lighting device includes dividing units(4). The dividing units divide the light used fro illumination into a plurality of partial beams. The partial beams illuminate the surface in the divided state.