| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To continuously circulate and supply the exhaust from a clean room to the clean room and the like for a long period by taking the exhaust from the clean room and the like used in a process of manufacturing an electronic apparatus, a precision apparatus and the like, and performing the cleaning to remove molecular contaminants and particulate contaminants. <P>SOLUTION: In this cleaning method of the clean room exhaust, the process air is allowed to pass through a temperature/humidity conditioner, and then pass through a batch-wise temperature swing adsorbing device using the air taken from the inside or outside of a room as regenerated air, or allowed to pass through the batch-wide temperature swing adsorbing device using the air taken from the inside or outside of the room as the regenerated air, and then pass through the temperature/humidity control device, in cleaning the exhaust from a clean working space such as the temperature/humidity-conditioned clean room and the like, as the process air, and circulating and supplying the same to the clean working space. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
