| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element that suppresses deformation of a structure of spaces and structural parts alternately arranged at a pitch equal to or shorter than the wavelengths of visible light, in the lamination of a structure or thin film over the structural parts including the spaces, and to provide a method of manufacturing the same. SOLUTION: The optical element has on a substrate at least a first layer and a second layer laminated on the first layer. The first layer includes a structure of spaces and structural parts alternately arranged at a pitch equal to or shorter than the wavelengths of visible light. For preventing deformation of the structure in the lamination of the second layer, top portions of the structural parts are beveled at a predetermined angle to top surfaces of the structural parts extending parallel to the lamination plane of the second layer. COPYRIGHT: (C)2009,JPO&INPIT |
