发明名称 EQUIPMENT AND METHOD FOR SYNTHESIZING METAL NANOPOWDER USING PLASMA
摘要 PROBLEM TO BE SOLVED: To provide a relatively simple equipment and a method for synthesizing metal nanopowder using plasma by which metal nanopowder can be formed with high productivity and uniform nano-sized metal particles can be formed. SOLUTION: The equipment and method for synthesizing metal nanopowder using plasma comprise: a plasma generator having a power source supply part, an electromagnetic wave generation part, a waveguide and a discharge tube for generating plasma; a gas and powder supply device for supplying (i) metal-oxide powder and reducing gas or (ii) reduced-metal powder and oxidizing gas, both preheated at 25 to 300°C, to a plasma generation part of the discharge tube; and a reaction tube which is connected to the lower end of the discharge tube and in which the powder supplied from the gas and powder supply device changes into a vapor phase and is cooled after reduction or oxidation reaction to form metal powder. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009138271(A) 申请公布日期 2009.06.25
申请号 JP20080310798 申请日期 2008.12.05
申请人 DONGJIN SEMICHEM CO LTD 发明人 KIM BYUNG UK;KIM SUNG BAE;LEE SUNG HYUN;HUH HYUN
分类号 B22F9/22;B22F9/28 主分类号 B22F9/22
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