发明名称 MESA TYPE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>A mesa-type semiconductor device and a manufacturing method thereof are provided to reduce a manufacturing cost and to prevent contamination and physical damage thereof. A mesa-type semiconductor device includes a semiconductor substrate(10), a first insulating layer(23), an electrode, a mesa groove(26), and a second insulating layer(27). The semiconductor substrate includes a first conductive type first semiconductor layer, a second conductive type second semiconductor layer, and a PN junction part(JC). The first insulating layer is formed to cover partially a surface of the second semiconductor layer. The first insulating layer has an opening for exposing a surface of the semiconductor layer. The electrode comes in contact with the surface of the second semiconductor layer through the opening. The mesa groove is formed to surround the electrode. The mesa groove has the predetermined depth from the surface of the second semiconductor layer. The second insulating layer is formed to cover the mesa groove, the first insulating layer, and an end of the electrode.</p>
申请公布号 KR20090068148(A) 申请公布日期 2009.06.25
申请号 KR20080129418 申请日期 2008.12.18
申请人 SANYO ELECTRIC CO., LTD.;SANYO SEMICONDUCTOR MANUFACTURING CO., LTD.;SANYO SEMICONDUCTOR COMPANY LIMITED 发明人 SUZUKI AKIRA;SEKI KATSUYUKI;ODAJIMA KEITA
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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