| 摘要 |
A lift pin assembly is provided to restore a lift pin to an initial position and to prevent a breaking effect by installing a position correction unit at a lower end of a lift pin. A lift pin assembly includes a lift pin holder, a lift pin body(132), a lift pin head(128), and a position correction unit. The lift pin holder is installed at a lift pin hole of a substrate loading plate. The lift pin body is inserted into a through-hole of the lift pin holder. The lift pin head is installed at a top end of the lift pin body. The lift pin head is suspended by a stopper of the substrate loading plate. The position correction unit is installed at a bottom end of the lift pin body in order to maintain a vertical state of the lift pin body. The position correction unit includes a rolling device.
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