MANUFACTURING METHOD FOR ORGANIC LIGHT EMITTING DEVICE

摘要

A manufacturing method of an organic light emitting device is provided to enhance efficiency and lifetime of a device by changing a layer formation condition of an electrode to improve surface roughness of the electrode. A preparation process is performed to prepare a substrate(110) including a thin film transistor. A first cathode electrode material(160a) is deposited on the substrate in a first deposition speed. A second cathode electrode material(160b) is deposited on the first cathode electrode material in a second deposition speed. A third cathode electrode material(160c) is deposited on the second cathode electrode material in a third deposition speed in order to complete a cathode deposition process. An organic layer is deposited on a cathode electrode(160). An anode electrode is formed on the cathode electrode.