| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor electrode capable of suppressing a decrease of a sensor capacity caused by damage even if physical damage is produced in the electrode by the deformation of a sensor element, and its manufacturing method. <P>SOLUTION: The sensor electrode related to one embodiment is used for performing electrochemical measurement and equipped with a polyimide substrate 1 having flexibility, the platinum layer 3 for an acting electrode formed on the polyimide substrate 1 and a silver layer 6 for a reference electrode. A gold layer 2 having an expansibility higher than the platinum layer 3 and conductivity is formed so as to be brought into contact with the undersurface of the platinum layer 3. Further, a gold layer 5 having an expansibility higher than the silver layer 6 and conductivity is formed so as to be brought into contact with the undersurface of the silver layer 6. <P>COPYRIGHT: (C)2007,JPO&INPIT |
