| 摘要 |
<p>A gas sensor (100) includes a gas sensing layer (118) including at least one chemical compound with the general formula M a 0 b N q , wherein M is at least one chemical element selected from the group consisting of W, Ti, Ta, Sr, Mo, and combinations thereof, and a , b , q are self-consistent, said gas sensing layer (118) being capable of detecting at least one gas selected from the group consisting of NOx, SO2, O2, H2O, CO, H2, and NH3, at least one electrode (112) positioned within an adhesion (114) layer composed of a material from the group consisting of Ti, Cr, and combinations thereof, and a response modification layer (116) composed of a material from the group consisting of Mg, Ti, V, Cr, Mn, Co, Ni, Zn, Nb, Ru, Rh, Pd, Ta, W, Re, Pt, and combinations thereof. The electrode (112) is in communication with the gas sensing layer (118). A method of fabricating the gas sensor is also disclosed.</p> |
