Linear electron source, evaporator using linear electron source, and applications of electron sources

摘要

An evaporation apparatus for evaporating a material to be deposited is described. The evaporation apparatus includes at least one evaporation crucible having a body with an area for receiving the material to be deposited at one side; a linear electron source (100) being positioned adjacent to the evaporation crucible for impingement of an electron beam on another side. The linear electron source includes a housing (112) acting as a first electrode, the housing having side walls (312); slit opening(114) in the housing for trespassing of a electron beam, the slit opening defining a length direction of the source; a second electrode being arranged within the housing and having a first side (413) facing the slit opening; and at least one gas supply for providing a gas into the housing, wherein the first electrode is the anode and the second electrode is the cathode.