CONTROL UNIT OF HIGH-SPEED PRECISION TRANSPORTING APPARATUS WITH SELF TUNING FUNCTION

摘要

A control unit of high-speed precision transporting apparatus with self tuning function is provided to minimize residual vibration by creating input shaping based on the vibration response which is obtained by reciprocating the stage on which an object is placed. A high-speed precision transporting apparatus with self tuning function comprises a stage on which an object is placed and a driving part moving the stage. A control unit of the apparatus includes a motor drive and a vibration removal part(56). The motor drive controls the operation of the driving part. The vibration removal part is connected to the motor drive, automatically calculates factors including natural frequency required for input shaping base on the vibration response which is obtained by reciprocating the stage, and controls the input shaping to generate vibration of reverse phase.