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发明名称
摘要
申请公布号
JP4285604(B2)
申请公布日期
2009.06.24
申请号
JP20030329135
申请日期
2003.09.19
申请人
发明人
分类号
H01L21/3065;H01L21/3205;H01L23/52
主分类号
H01L21/3065
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代理人
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地址
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