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发明名称
摘要
申请公布号
JP4285665(B2)
申请公布日期
2009.06.24
申请号
JP19990534781
申请日期
1998.12.24
申请人
发明人
分类号
H01L35/14;H01L35/04;H01L35/08;H01L35/22;H01L35/32
主分类号
H01L35/14
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代理人
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