PROCESS OF FORMING THIN FILM WITH IMPROVED PHYSICAL PROPERTIES

摘要

A method for forming a thin film having excellent physical property is provided to gain a uniform thin film by preventing adsorption of a source on the surface of an object to be processed and to improve physical property of the thin film. A method for forming a thin film having excellent physical property comprises the following steps of: adsorbing a first source on an object to be processed; forming a first source thin film by performing a first source removing process consecutively; adsorbing the first source on the object by supplying a second source reacting with the first source; and forming a first and second source thin film by removing the second source which is not adsorbed on the object.