发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF FORMING INTEGRATED PASSIVE DEVICE MODULE |
摘要 |
A method for forming a semiconductor device and an integrated passive device module is provided to reduce a fabrication cost and to enhance total repeatable quality. An insulating layer is formed on a top end of a substrate(16). An integrated passive circuit is formed on the top end of the substrate. A wafer carrier bonding process is performed to bond a wafer carrier on the integrated passive circuit. A substrate removal process is performed to remove the substrate. A deposition process is performed to deposit an insulating polymer film on the insulating layer. An interconnecting structure is formed on an upper surface of the insulating polymer film layer. |
申请公布号 |
KR20090066211(A) |
申请公布日期 |
2009.06.23 |
申请号 |
KR20080115949 |
申请日期 |
2008.11.20 |
申请人 |
STATS CHIPPAC LTD. |
发明人 |
LIN YAOJIAN;CAO HAIJING;ZHANG QING;CHEN KANG;FANG JIANMIN |
分类号 |
H01L23/12;H01L23/28 |
主分类号 |
H01L23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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