发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FORMING INTEGRATED PASSIVE DEVICE MODULE
摘要 A method for forming a semiconductor device and an integrated passive device module is provided to reduce a fabrication cost and to enhance total repeatable quality. An insulating layer is formed on a top end of a substrate(16). An integrated passive circuit is formed on the top end of the substrate. A wafer carrier bonding process is performed to bond a wafer carrier on the integrated passive circuit. A substrate removal process is performed to remove the substrate. A deposition process is performed to deposit an insulating polymer film on the insulating layer. An interconnecting structure is formed on an upper surface of the insulating polymer film layer.
申请公布号 KR20090066211(A) 申请公布日期 2009.06.23
申请号 KR20080115949 申请日期 2008.11.20
申请人 STATS CHIPPAC LTD. 发明人 LIN YAOJIAN;CAO HAIJING;ZHANG QING;CHEN KANG;FANG JIANMIN
分类号 H01L23/12;H01L23/28 主分类号 H01L23/12
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