SHADOW MASK AND METHOD FOR FABRICATING OF THE SAME

摘要

A shadow mask and a manufacturing method thereof are provided to prevent a lowering effect of a light-emitting characteristic of an OLED(Organic Light Emitting Device) by preventing a lowering effect of a surface roughness of a shadow mask. A shadow mask(100) includes a mask substrate(110) and a protective layer(140). The mask substrate includes a plurality of light-transmitting regions(120) and a light shielding region(130). The protective layer is formed on the mask substrate. The protective layer is comprised of one selected from a group including a silicon oxide, a silicon nitride, a ceramic metal, and a metal. The protective layer has a thickness of 1-100mum. The light-transmitting region is formed with a shape of slit.