发明名称 Semiconductor constructions comprising particle-containing materials
摘要 The invention includes methods of forming particle-containing materials, and also includes semiconductor constructions comprising particle-containing materials. One aspect of the invention includes a method in which a first monolayer is formed across at least a portion of a semiconductor substrate, particles are adhered to the first monolayer, and a second monolayer is formed over the particles. Another aspect of the invention includes a construction containing a semiconductor substrate and a particle-impregnated conductive material over at least a portion of the semiconductor substrate. The particle-impregnated conductive material can include tungsten-containing particles within a layer which includes tantalum or tungsten.
申请公布号 US7550848(B2) 申请公布日期 2009.06.23
申请号 US20060400613 申请日期 2006.04.06
申请人 MICRON TECHNOLOGY, INC. 发明人 DERDERIAN GARO J.;SANDHU GURTEJ S.
分类号 H01L23/48;B32B15/00;H01L21/288;H01L21/768 主分类号 H01L23/48
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