发明名称 Fully siliciding regions to improve performance
摘要 Structures and related methods including fully silicided regions are disclosed. In one embodiment, a structure includes a substrate; a partially silicided region located in an active region of an integrated circuit formed on the substrate; a fully silicided region located in a non-active region of the integrated circuit, and wherein the partially and fully silicided regions are formed from a common semiconductor layer.
申请公布号 US7550808(B2) 申请公布日期 2009.06.23
申请号 US20070624324 申请日期 2007.01.18
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ANDERSON BRENT A.;NOWAK EDWARD J.
分类号 H01L29/78;H01L21/3205 主分类号 H01L29/78
代理机构 代理人
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