发明名称 |
Methods of making slotted substrates |
摘要 |
The described embodiments relate to slotted substrates and methods of making the slotted substrates. One exemplary method patterns a first set of dummy features in a first layer positioned over a first surface of a substrate and patterns a second set of dummy features in a second layer positioned over the first layer. After the method patterns the first set of dummy features and the second set of dummy features, the method further forms a slot in the substrate, at least in part, by allowing an etchant to pass through the first and second sets of dummy features to the first surface.
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申请公布号 |
US7549224(B2) |
申请公布日期 |
2009.06.23 |
申请号 |
US20060450572 |
申请日期 |
2006.06.09 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
OBERT JEFFREY S.;OTTENHEIMER THOMAS H. |
分类号 |
B23P17/00;B41J2/14;B41J2/16 |
主分类号 |
B23P17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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