发明名称 Calibrating device for adapting a measuring device for measuring the thickness of thin layers on an object to be measured
摘要 The invention relates to a calibrating device for adapting a measuring device for measuring the thickness of thin layers on an object to be measured, comprising a calibrating surface (12) having a flat upper side and a flat underside, which are provided at a distance with a predetermined thickness, characterized in that the calibrating surface (12) is arranged separate from at least one edge area (18) and the calibrating surface (12) is connected to the at least one edge area (18) via at least one transition area (14).
申请公布号 US7549314(B2) 申请公布日期 2009.06.23
申请号 US20050629018 申请日期 2005.06.06
申请人 IMMOBILIENGESELLSCHAFT HELMUT FISCHER GMBH & CO. KG 发明人 FISCHER HELMUT
分类号 G01B3/30;G01B7/06;G01B21/08 主分类号 G01B3/30
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