发明名称 FILM SUBSTRATE FORMED WITH FINE CIRCUIT THEREON AND MANUFACTURING METHOD THEREOF
摘要 A film substrate including a fine circuit and a manufacturing method thereof are provided to form stably a fine circuit thereon by performing a simple manufacturing process. A master preparation process is performed to prepare a master including an embossing fine circuit pattern formed at least one surface thereof(S110). A releasing agent is coated on a residual region except for a depressed fine circuit pattern region of a film substrate(S130). The master is removed from the film substrate(S140). A sputtering process is performed to fill up a metal in the fine circuit pattern. A removal process is performed to remove the releasing agent from the fine circuit pattern except form the metal included in the fine circuit pattern.
申请公布号 KR20090065898(A) 申请公布日期 2009.06.23
申请号 KR20070133442 申请日期 2007.12.18
申请人 SEONG, NAK HOON 发明人 SEONG, NAK HOON
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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