OPTICAL WAVEGUIDE STRUCTURE AND METHOD MANUFACTURING OPTICAL WAVEGUIDE STRUCTURE

摘要

An optical waveguide and a manufacturing method thereof are provided to reduce additional loss due to bending by using a flexible metal line and low loss polymer dielectric layer. An optical waveguide includes a bottom clad, a top clad, a metal line(130), and a thin film(140). The bottom clad and the top clad are formed by laminating two or more flexible low loss polymer dielectric layers having different refractive index. The metal line is formed as an optical waveguide core having a limited width and thickness between the top clad and the bottom clad. The thin film is formed on the same surface as the metal line.