| 摘要 |
A vane type vacuum pump is provided to reduce the side loads of vanes by the decrease of exhaust resistance applying time and reduce the pulsation noise and vacuum by the decrease of air discharge amount, by employing a pump rotor having first and two paths and four vane grooves. A vane type vacuum pump(100) includes a pump housing(110), a rotor(120), vanes(130), and a check valve(140). The pump housing forms the appearance of the pump and incorporates a rotor inside rotatively. The pump rotor is formed with vane grooves at four peripheral positions towards the center of the rotor. The vanes are inserted into the vane grooves respectively and guided to slide in the vane grooves. The check valve is mounted at a side of the pump housing and prevents the generation of reverse flow at an intake hole. |
