摘要 |
A thin film type dual axis driving mirror for a laser display and a manufacturing method thereof are provided to improve light efficiency by enhancing a fill factor through increase of reflection efficiency. A thin film type dual axis driving mirror includes a cantilever beam, a first torsion bar, a second torsion bar, a coil wire, a printed circuit board or a ceramic board, a magnetic flux inducing frame, and a magnet. The cantilever beam(30) of a vertical axis drive is formed inside a chip for the driving mirror. The first torsion bar(31) is positioned on a rotary axis of the cantilever beam of the vertical axis drive. A cantilever beam(32) of a horizontal axis drive is formed in outer part of the cantilever beam of the vertical axis drive. The chip for the driving mirror is mounted on the printed circuit board or the ceramic board, and is fixed by a fixing member(51). The magnetic flux inducing frame(60) is supported by the printed circuit board or the ceramic board. The magnet(70) is mounted inside the magnetic flux inducing frame.
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