| 摘要 |
FIELD: instrument engineering. ^ SUBSTANCE: invention refers to angular rate measurement of objects, for example for controlling moving transport vehicles by using position control and navigation systems, and is based on using transverse electroacoustic effect. Method involves use of plate made from piezoelectric semiconductor or from "piezoelectric-semiconductor" sandwich structure to which there applied are interdigital transducers of not less than one driver of surface acoustic wave, absorbers of surface acoustic wave as well as electrodes and contact bars of sensing element of electric properties, and by those values the value of angular rate of piezoelectric semiconductor plate is judged. ^ EFFECT: improving sensitivity and accuracy of measurements. ^ 2 cl, 1 dwg |
