| 摘要 |
<p>A substrate cabinet (1) is provided with multiple shelves (5) whereupon a plurality of cassettes (80) having hermetic covers for storing a plurality of substrates (W) can be placed; a substrate transfer section (20), which is movably arranged at the front (5a) of the multiple shelves (5) to open/close the hermetic cover of the cassette (80) placed on the multiple shelves (5) and to transfer a substrate (W) between the cassettes (80); and a cassette transfer section (30), which is movably arranged at the rear (5b) of the multiple selves (5) and carries in/out the cassettes (80) to and from all the cassette placing positions (5c) on the multiple shelves (5). With the substrate cabinet (1), substrates stored in the cassette can be replaced and the cassette can be carried in/out at a correct time.</p> |
