| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute pattern transferring apparatus that can be suitably used for transferring minute pits to a thin substrate more speedily and precisely. SOLUTION: The minute pattern transferring apparatus is the one which heats and presses a stacked body, formed by stacking a first fixture (102), a stamper (100), a thermoplastic sheet (103) and a second fixture (104), in the stack direction and transfers the minute pattern engraved in the stamper to the thermoplastic sheet. The outside diameters of the first fixture, the stamper and the second fixture are made larger than that of the thermoplastic sheet, and the height of the outer periphery part of the surface subject to heat and a pressure of the second fixture is made higher than that of the inner periphery part. The transfer pressure applied to the outer periphery part becomes larger and the heat content of the outer periphery part becomes larger, which enables more uniform heating and pressurization. COPYRIGHT: (C)2009,JPO&INPIT
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