发明名称 |
CAPACITIVE INTEGRATED MEMS MULTI-SENSOR |
摘要 |
Apparatus, methods, and systems for incorporating and reading a plurality of bridge sensors is disclosed. The bridge sensors may be capacitive bridge sensors located on the same substrate with a digital processor and signal processing circuits to read the outputs of the sensors. The bridge sensors are accessed by a switch network coupled to the plurality of bridge sensors to selectively provide an output from at least one of the plurality of bridge sensors. The switch network may be a multiplexer, which provides a periodically oscillating voltage to the sensors, to energize the sensors. The multiplexer may also provide output from the energized sensor to the digital processor.
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申请公布号 |
US2009150029(A1) |
申请公布日期 |
2009.06.11 |
申请号 |
US20070942592 |
申请日期 |
2007.11.19 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
PAVELESCU IOAN;GEORGESCU ION;COBIANU CORNEL P.;GURAN DANA ELENA |
分类号 |
B60R21/00;G01P15/08;G01P15/125;G01P21/00 |
主分类号 |
B60R21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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