| 发明名称 |
HIGH THROUGHPUT IMPRINT BASED ON CONTACT LINE MOTION TRACKING CONTROL |
| 摘要 |
Systems and methods for controlling velocity of a contact line and height profile between a template and a substrate during imprinting of polymerizable material are described. |
| 申请公布号 |
WO2009073200(A1) |
申请公布日期 |
2009.06.11 |
| 申请号 |
WO2008US13362 |
申请日期 |
2008.12.04 |
| 申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
LU, XIAOMING;SCHUMAKER, PHILIP D. |
| 分类号 |
G05B19/18 |
主分类号 |
G05B19/18 |
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