| 摘要 |
[PROBLEMS] To provide, in a diaphragm type piezoelectric pump using a piezoelectric element having a bimorph structure, an efficient piezoelectric pump by removing a factor of inhibiting the deformation of the piezoelectric element. [MEANS FOR SOLVING PROBLEMS] A piezoelectric pump comprises a diaphragm (21) forming a pump chamber (12) between a pump body (10) and itself and a piezoelectric element (22) being face-to-face bonded to the surface of the diaphragm. The piezoelectric element (22) is a bimorph type piezoelectric element in which a plurality of piezoelectric layers are stacked and a neutral layer (22b) that is not spontaneously deformed is provided at an intermediate portion in the thickness direction of the piezoelectric element. A neutral plane (Fd) of the overall diaphragm including the piezoelectric element is located within the neutral layer (22b) of the piezoelectric element, so that the piezoelectric element (22) is effectively deformed. |
