| 摘要 |
PROBLEM TO BE SOLVED: To surely confirm for a short time that a production flow for the production of a semiconductor device matches a rule. SOLUTION: When a product ID to be checked is input by an input section 6, an extraction section 7 extracts a production flow corresponding to the input product ID from a production condition flow storage section 2. Then, a determination section 8 compares processing procedures (order) with each other between a step name of a step ID in the extracted production condition flow and a step name of a step rule stored in a step rule storage section 3, and it judges whether or not they match each other. When they match each other, the result shoes that the extracted production condition flow does not violate the step rule, so that an indication such as "verified" or the like is displayed on an output section 5 by a control section 9. When they do not match, an indication showing the violation of rule is displayed on the output section 5. COPYRIGHT: (C)2009,JPO&INPIT
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