发明名称 DEVICE AND METHOD FOR ALIGNING WAFERS ON A FLAT SUPPORT
摘要 <p>The invention relates to a device for aligning wafers on a flat support (2), comprising a body (1) stationary with respect to the support (2), characterized in that said device comprises guide wires (4) placed above the support (2), defining a plurality of mesh cells (5), and devices (6, 7) for tensioning the wires (4) suitable for placing the wires (4) in a placing position in which the wires (4) are relaxed, in such a way that each wafer can be based in a mesh cell (5), and in an alignment position in which the wires (4) are kept under tension above the support (2) so that each wafer housed in a mesh cell (5) is laterally circumscribed by the wires (4) forming this mesh cell (5), so as to align the wafers along the wires (4). The invention also relates to a method of aligning wafers on a flat support.</p>
申请公布号 WO2009071790(A1) 申请公布日期 2009.06.11
申请号 WO2008FR52071 申请日期 2008.11.18
申请人 CENTRE NATIONAL D'ETUDES SPATIALES (C.N.E.S.);PENQUER, ANTOINE;EHANNO, MICHEL 发明人 PENQUER, ANTOINE;EHANNO, MICHEL
分类号 H01L21/68;H01L21/00 主分类号 H01L21/68
代理机构 代理人
主权项
地址